BROADBAND ION BEAM ANALYZER

A broadband ion beam analyzer, used for isolating required ions from a broadband ion beam, comprising an upper magnetic pole (1), a lower magnetic pole (2), an upper excitation coil (3), a lower excitation coil (4), an analysis grating (7), and a magnetic yoke (5 and 6). The upper magnetic pole (1)...

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Bibliographische Detailangaben
Hauptverfasser: XIE, JUNYU, LONG, HUIYUE, PENG, LIBO
Format: Patent
Sprache:chi ; eng ; fre
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Zusammenfassung:A broadband ion beam analyzer, used for isolating required ions from a broadband ion beam, comprising an upper magnetic pole (1), a lower magnetic pole (2), an upper excitation coil (3), a lower excitation coil (4), an analysis grating (7), and a magnetic yoke (5 and 6). The upper magnetic pole (1) and the lower magnetic pole (2) are both provided with an arc-shaped incident-side boundary (101) and an arc-shaped emergence side boundary (102). The camber radii (Rb) of the incident-side boundary (101) and of the emergence-side boundary (102) are equal to the deflection radius (R) of the required ions in a magnetic field. The required ions in the broadband ion beam are allowed to focus ideally at the mid-section of the magnetic field, and to acquire an ideal focus having a spot size that equals zero. This allows for acquisition of the optimal recognition rate by selecting an appropriate width for a minimal analysis gap (701), thus implementing complete isolation of the required ions from other ions in the broadb