THIN FILM MICROMACHINED GAS SENSOR

A thin film/MEMS electrochemical gas sensor includes a body having first and second joined subassemblies to form an interior portion of the body, and is composed of a semiconductor material. The body includes at least one opening configured to allow air to pass into the interior portion of the body....

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ZRIBI, ANIS, MOTT, KEN
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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