METHOD FOR COATING MICROMECHANICAL PARTS WITH DUAL DIAMOND COATING

Method for coating micromechanical components of a micromechanical system, in particular a watch movement, comprising: providing a substrate (4) component to be coated; providing said component with a first diamond coating (2) doped with boron; providing said component with a second diamond coating...

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Hauptverfasser: STEINMUELLER, DORIS, GILOMEN, BEAT, RICHARD, DAVID, BOURBAN, STEWES, STEINMUELLER, DETLEF, GHODBANE, SLIMANE, DREXEL, HERWIG
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creator STEINMUELLER, DORIS
GILOMEN, BEAT
RICHARD, DAVID
BOURBAN, STEWES
STEINMUELLER, DETLEF
GHODBANE, SLIMANE
DREXEL, HERWIG
description Method for coating micromechanical components of a micromechanical system, in particular a watch movement, comprising: providing a substrate (4) component to be coated; providing said component with a first diamond coating (2) doped with boron; providing said component with a second diamond coating (3); wherein :said second diamond coating (3) is provided by CVD in a reaction chamber; during CVD deposition, during the last portion of the growth process, a controlled increase of the carbon content within the reaction chamber is provided, thereby providing an increase of the sp2/sp3 carbon (6) bonds up to an sp2 content substantially between 1% and 45%. Corresponding micromechanical components are also provided. L'invention concerne un procédé de revêtement de composants micromécaniques d'un système micromécanique, en particulier d'un mouvement de montre, consistant à : se procurer un composant de substrat (4) à revêtir ; doter ledit composant d'un premier revêtement de diamant (2) dopé au bore ; doter ledit composant d'un second revêtement de diamant (3) ; ledit second revêtement de diamant (3) étant réalisé par un dépôt chimique en phase vapeur (CVD) dans une chambre de réaction ; au cours du dépôt CVD, au cours de la dernière partie du procédé de croissance, une augmentation contrôlée de la teneur en carbone à l'intérieur de la chambre de réaction étant réalisée, fournissant par là une augmentation des liaisons carbone sp2/sp3 (6) jusqu'à une teneur en sp2 sensiblement entre 1% et 45%. L'invention concerne également des composants micromécaniques correspondants.
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Corresponding micromechanical components are also provided. L'invention concerne un procédé de revêtement de composants micromécaniques d'un système micromécanique, en particulier d'un mouvement de montre, consistant à : se procurer un composant de substrat (4) à revêtir ; doter ledit composant d'un premier revêtement de diamant (2) dopé au bore ; doter ledit composant d'un second revêtement de diamant (3) ; ledit second revêtement de diamant (3) étant réalisé par un dépôt chimique en phase vapeur (CVD) dans une chambre de réaction ; au cours du dépôt CVD, au cours de la dernière partie du procédé de croissance, une augmentation contrôlée de la teneur en carbone à l'intérieur de la chambre de réaction étant réalisée, fournissant par là une augmentation des liaisons carbone sp2/sp3 (6) jusqu'à une teneur en sp2 sensiblement entre 1% et 45%. 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Corresponding micromechanical components are also provided. L'invention concerne un procédé de revêtement de composants micromécaniques d'un système micromécanique, en particulier d'un mouvement de montre, consistant à : se procurer un composant de substrat (4) à revêtir ; doter ledit composant d'un premier revêtement de diamant (2) dopé au bore ; doter ledit composant d'un second revêtement de diamant (3) ; ledit second revêtement de diamant (3) étant réalisé par un dépôt chimique en phase vapeur (CVD) dans une chambre de réaction ; au cours du dépôt CVD, au cours de la dernière partie du procédé de croissance, une augmentation contrôlée de la teneur en carbone à l'intérieur de la chambre de réaction étant réalisée, fournissant par là une augmentation des liaisons carbone sp2/sp3 (6) jusqu'à une teneur en sp2 sensiblement entre 1% et 45%. L'invention concerne également des composants micromécaniques correspondants.</abstract><oa>free_for_read</oa></addata></record>
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subjects BRAIDING
CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
DIFFUSION TREATMENT OF METALLIC MATERIAL
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
KNITTING
LACE-MAKING
METALLURGY
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
NON-WOVEN FABRICS
PERFORMING OPERATIONS
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
TEXTILES
TRANSPORTING
TRIMMINGS
title METHOD FOR COATING MICROMECHANICAL PARTS WITH DUAL DIAMOND COATING
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