METHOD FOR COATING MICROMECHANICAL PARTS WITH DUAL DIAMOND COATING

Method for coating micromechanical components of a micromechanical system, in particular a watch movement, comprising: providing a substrate (4) component to be coated; providing said component with a first diamond coating (2) doped with boron; providing said component with a second diamond coating...

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Bibliographische Detailangaben
Hauptverfasser:	STEINMUELLER, DORIS, GILOMEN, BEAT, RICHARD, DAVID, BOURBAN, STEWES, STEINMUELLER, DETLEF, GHODBANE, SLIMANE, DREXEL, HERWIG
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BRAIDING CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL KNITTING LACE-MAKING METALLURGY MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY NON-WOVEN FABRICS PERFORMING OPERATIONS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TEXTILES TRANSPORTING TRIMMINGS
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Beschreibung
Zusammenfassung:	Method for coating micromechanical components of a micromechanical system, in particular a watch movement, comprising: providing a substrate (4) component to be coated; providing said component with a first diamond coating (2) doped with boron; providing said component with a second diamond coating (3); wherein :said second diamond coating (3) is provided by CVD in a reaction chamber; during CVD deposition, during the last portion of the growth process, a controlled increase of the carbon content within the reaction chamber is provided, thereby providing an increase of the sp2/sp3 carbon (6) bonds up to an sp2 content substantially between 1% and 45%. Corresponding micromechanical components are also provided. L'invention concerne un procédé de revêtement de composants micromécaniques d'un système micromécanique, en particulier d'un mouvement de montre, consistant à : se procurer un composant de substrat (4) à revêtir ; doter ledit composant d'un premier revêtement de diamant (2) dopé au bore ; doter ledit composant d'un second revêtement de diamant (3) ; ledit second revêtement de diamant (3) étant réalisé par un dépôt chimique en phase vapeur (CVD) dans une chambre de réaction ; au cours du dépôt CVD, au cours de la dernière partie du procédé de croissance, une augmentation contrôlée de la teneur en carbone à l'intérieur de la chambre de réaction étant réalisée, fournissant par là une augmentation des liaisons carbone sp2/sp3 (6) jusqu'à une teneur en sp2 sensiblement entre 1% et 45%. L'invention concerne également des composants micromécaniques correspondants.