METHOD FOR PERFORMING AN ANTISTATIC TREATMENT ON A SURFACE OF A WORK STAGE, AND WORK STAGE TO THE SURFACE OF WHICH AN ANTISTATIC TREATMENT IS APPLIED ACCORDING TO THE METHOD

The present invention relates to a method for performing an antistatic treatment on a surface of a work stage made of metal, and to a work stage, to the surface of which the antistatic treatment is applied. The method for performing an antistatic treatment on a surface of a work stage made of metal...

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Bibliographische Detailangaben
Hauptverfasser:	AHN, YOCHAN, KOO, SUNGCHANG, LEE, DONGMYEON, PARK, DOHYEONG
Format:	Patent
Sprache:	eng ; fre ; kor
Schlagworte:	APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROFORMING ELECTROLYTIC OR ELECTROPHORETIC PROCESSES INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The present invention relates to a method for performing an antistatic treatment on a surface of a work stage made of metal, and to a work stage, to the surface of which the antistatic treatment is applied. The method for performing an antistatic treatment on a surface of a work stage made of metal according to a preferred embodiment of the present invention comprises the following steps: anodizing the surface of the work stage made of metal to form a plurality of holes in the oxidized surface; inserting carbon nanotubes into each of the holes in the oxidized surface; hardening the carbon nanotubes; and sealing the surface of the work stage after hardening the carbon nanotubes. According to the present invention, the generation of static electricity at the work stage is reduced, the frictional coefficient of the work stage is lowered, and the abrasion resistance of the work stage is improved. Cette invention concerne un procédé de mise en oeuvre d'un traitement antistatique sur la surface d'un étage de travail en métal, et un étage de travail ayant une surface sur laquelle ledit traitement antistatique est appliqué. Le procédé de mise en oeuvre d'un traitement antistatique sur la surface d'un étage de travail en métal selon un mode de réalisation préféré de l'invention comprend les étapes suivantes : anodisation de la surface de l'étage de travail en métal pour former une pluralité de trous dans la surface oxydée ; insertion de nanotubes de carbone dans chacun des trous formés dans la surface oxydée ; durcissage des nanotubes de carbone ; et étanchéisation de la surface de l'étage de travail après durcissage des nanotubes de carbone. Selon la présente invention, la génération d'électricité statique audit étage de travail est réduite, le coefficient de frottement de l'étage de travail est abaissé, et sa résistance à l'abrasion est améliorée.