SUPPORT FOR SEMICONDUCTOR SUBSTRATE

A moveable semiconductor substrate support includes a control device receiving data from one or more sensors and providing control signals to one or more actuators. The control device is coupled to and moves with the moveable substrate support to facilitate flexible and complex operation of the subs...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LABERGE, MATTHEW, PALM, TROY, SOWDEN, RALPH, BARR, KEVIN, BENSON, DENNIS
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CHAMBERS PROVIDED WITH MANIPULATION DEVICES HAND TOOLS MANIPULATORS PERFORMING OPERATIONS PORTABLE POWER-DRIVEN TOOLS TRANSPORTING
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