OPTICAL MEASURING SYSTEM WITH ILLUMINATION PROVIDED THROUGH A VOID IN A COLLECTING LENS

An optical measuring system includes a scatterometer in which an illumination beam is provided through an aperture in a lens used to collect light for the scattering detection. The void may be a slit in the lens, a missing portion along an edge of the lens, or another suitable void. Another detectio...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TOKER, GREGORY, BRUNFELD, ANDREI, CLARK, BRYAN, ROSCROW, MOREY, T
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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