METHOD FOR FORMATION OF CONCAVE-CONVEX PATTERN USING PHOTOCURABLE TRANSCRIPTION SHEET, AND DEVICE FOR USE IN THE METHOD

Disclosed are: a method for forming a fine concave-convex pattern on a photocurable resin by a nano imprinting process method using an intermediate stamper, wherein the releasability between the intermediate stamper and the photocurable resin having the fine concave-convex pattern transferred thereo...

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Bibliographische Detailangaben
Hauptverfasser:	KAIDA EIZOU, HASHIMOTO MASASHI, INAMIYA TAKATO
Format:	Patent
Sprache:	eng ; fre ; jpn
Schlagworte:	AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MATERIALS THEREFOR MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES MICROSTRUCTURAL TECHNOLOGY NANOTECHNOLOGY ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS SEMICONDUCTOR DEVICES SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES TRANSPORTING WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Beschreibung
Zusammenfassung:	Disclosed are: a method for forming a fine concave-convex pattern on a photocurable resin by a nano imprinting process method using an intermediate stamper, wherein the releasability between the intermediate stamper and the photocurable resin having the fine concave-convex pattern transferred thereon is improved; and a device which can be used for the method. Specifically disclosed is a method for forming a concave-convex pattern, which comprises a step of transferring a fine concave-convex pattern formed on the surface of a mold (34) onto a transfer layer (31) that is formed in a photocurable transfer sheet (30) and is composed of a photocurable composition capable of being deformed by pressurization to form a fine inverted concave-convex pattern on the transfer layer (31) and a step of transferring the resulting inverted concave-convex pattern onto a photocurable resin layer (41) that is formed on a substrate (40) and is composed of a photocurable resin composition to thereby form the same concave-convex pattern as that formed on the mold (34) on the photocurable resin layer (41). The method is characterized in that the transfer layer (31c) having the inverted concave-convex pattern formed thereon is subjected to a UV ozone treatment. La présente invention concerne un procédé destiné à former une structure fine concave-convexe sur une résine photodurcissable par un procédé de nano impression utilisant une matrice de pressage intermédiaire, dans lequel la cessibilité entre la matrice de pressage intermédiaire et la résine photodurcissable ayant la structure fine concave-convexe transférée sur celle-ci est améliorée ; et un dispositif qui peut être utilisé pour le procédé. La présente invention concerne spécifiquement un procédé destiné à former une structure concave-convexe qui comprend une étape de transfert d'une structure fine concave-convexe formée sur la surface d'un moule (34) sur une couche de transfert (31) qui est constituée dans une feuille de transfert photodurcissable (30) et se compose d'une composition photodurcissable capable d'être déformée par pressurisation afin de former une structure fine concave-convexe inversée sur la couche de transfert (31) et une étape de transfert de la structure concave-convexe inversée résultante sur une couche de résine photodurcissable (41) qui est formée sur un substrat (40) et se compose d'une composition en résine photodurcissable pour former ainsi la même structure concave-convexe que celle formée sur le