HOT-TRAP ASSEMBLY

The present invention relates to the field of hot-traps, devices used together with vacuum pump systems to clean the gases exhausted from the treatment area. Particularly, the present invention discloses modifications of hot-trap devices. Furthermore, vacuum pump systems comprising such inline hot-t...

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Bibliographische Detailangaben
Hauptverfasser:	SCHNEIDER, STEFAN, BHANGU, KAVREET
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The present invention relates to the field of hot-traps, devices used together with vacuum pump systems to clean the gases exhausted from the treatment area. Particularly, the present invention discloses modifications of hot-trap devices. Furthermore, vacuum pump systems comprising such inline hot-trap devices are disclosed. La présente invention porte sur le domaine des pièges chauds, sur des dispositifs utilisés avec des systèmes de pompe à vide pour purifier les gaz échappés de la zone de traitement. En particulier, la présente invention propose des modifications sur des dispositifs de piège chaud. De plus, l'invention porte sur des systèmes de pompe à vide comprenant de tels dispositifs de piège chaud en ligne.