METHOD AND SYSTEM FOR FORMING A METAL ELECTRODE FOR A SOLAR CELL

A method and system for forming a metal electrode for a solar cell, and a solar cell. The method comprises the steps of providing a shadow mask adjacent a dielectric layer at a front or rear surface of the solar cell; and directing a metal ion beam through the shadow mask onto the dielectric layer,...

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Bibliographische Detailangaben
Hauptverfasser:	OON, CHIN HIN, ABERLE, ARMIN GERHARD, VINODH, SHANMUGAM
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGYGENERATION, TRANSMISSION OR DISTRIBUTION SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE
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Beschreibung
Zusammenfassung:	A method and system for forming a metal electrode for a solar cell, and a solar cell. The method comprises the steps of providing a shadow mask adjacent a dielectric layer at a front or rear surface of the solar cell; and directing a metal ion beam through the shadow mask onto the dielectric layer, wherein a first energy of the metal ions in the metal ion beam is chosen to cause both ablation of particles of the dielectric layer and implantation of the metal ions into the dielectric film, whereby at least some of the metal ions are provided on said front or rear surface of the solar cell to form an electrical contact to the solar cell. Procédé et dispositif de fabrication d'une électrode métallique pour pile photovoltaïque, et pile photovoltaïque. Le procédé consiste à disposer un masque perforé adjacent à une couche diélectrique au niveau d'une surface avant ou arrière de la pile photovoltaïque et à diriger un faisceau d'ions métalliques sur la couche diélectrique à travers le masque perforé. Une première énergie des ions métalliques dans le faisceau d'ions métalliques est choisie pour entraîner une ablation de particules de la couche diélectrique et une implantation des ions métalliques dans le film diélectrique, une partie au moins des ions métalliques se retrouvant sur ladite surface avant ou arrière de la pile photovoltaïque et formant un contact électrique avec ladite pile.