HUMIDITY DETECTION SENSOR

Disclosed is a humidity detection sensor having a parallel flat plate shape in which there is no variability of sensitivity. The humidity detection sensor includes: a substrate (51); a sensor unit which has a humidity-sensitive region (A) wherein a humidity-sensitive polymer film (54) having a diele...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WAGA, SATOSHI, SATO, TAKASHI, GOCHO, HIDEKI, MORITA, SUMIHITO
Format:	Patent
Sprache:	eng ; fre ; jpn
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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