ACCELERATION SENSOR

Disclosed is an acceleration sensor provided with sensor sections comprising: a weight section which is integrally formed from a concave section which opens on one surface of the acceleration sensor, and a solid section which does not include the concave section; a pair of beam sections which rotata...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	UEDA, HIDEKI, KAKIMOTO, KATUMI, SUZUKI, YUJI, OKADA, TAKESHI, IBARA, NOBUYUKI, NOMURA, MASATOSI, MORI, TAKESHI, YOSIDA, HITOSHI
Format:	Patent
Sprache:	eng ; fre ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS SEMICONDUCTOR DEVICES TESTING
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