SUBSTRATE ANALYSIS USING SURFACE ACOUSTIC WAVE METROLOGY

A system for imposing and analyzing surface acoustic waves in a substrate to determine characteristics of the substrate is disclosed. Optical elements and arrangements for imposing and analyzing surface acoustic waves in a substrate are also disclosed. NSOM's, gratings, and nanolight elements m...

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Bibliographische Detailangaben
Hauptverfasser:	KOTELYANSKII, MICHAEL, J, MARIS, HUMPHREY, COLGAN, MICHAEL, MORATH, CHRISTOPHER, J
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] COLORIMETRY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES MEASURING NANOTECHNOLOGY PERFORMING OPERATIONS PHYSICS RADIATION PYROMETRY SCANNING-PROBE TECHNIQUES OR APPARATUS SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	A system for imposing and analyzing surface acoustic waves in a substrate to determine characteristics of the substrate is disclosed. Optical elements and arrangements for imposing and analyzing surface acoustic waves in a substrate are also disclosed. NSOM's, gratings, and nanolight elements may be used to impose surface acoustic waves in a substrate and may also be used to measure transient changes in the substrate due to the passage of surface acoustic waves therethrough. La présente invention concerne un système permettant d'envoyer des ondes acoustiques de surface dans un substrat et de les analyser pour déterminer des caractéristiques du substrat. L'invention concerne également des éléments et dispositifs optiques permettant d'injecter des ondes acoustiques de surface dans un substrat et de les analyser. On peut également faire intervenir la microscopie optique à balayage à champ proche, des dépolis, et des éléments lumineux nanométriques, non seulement pour injecter des ondes acoustiques de surface dans un substrat, mais aussi pour mesurer les modifications transitoires que font subir au substrat les ondes acoustiques de surface qui y circulent.