PHOTOCURABLE TRANSFER SHEET, AND METHOD FOR FORMING RECESSED AND PROJECTED PATTERN USING SAME

Disclosed is a photocurable transfer sheet which can be advantageously used for the production of an intermediate stamper that is used in a nanoimprinting process. The photocurable transfer sheet exhibits excellent releasability from a mold, which is used for the production of the intermediate stamp...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KAIDA EIZOU, HASHIMOTO MASASHI, INAMIYA TAKATO
Format: Patent
Sprache:eng ; fre ; jpn
Schlagworte:
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