METHOD FOR COATING MICROMECHANICAL PARTS WITH HIGH TRIBOLOGICAL PERFORMANCES FOR APPLICATION IN MECHANICAL SYSTEMS

Method for coating micromechanical components of a micromechanical system, in particular a watch movement, comprising: providing a substrate (4) component to be coated; providing said component with a diamond coating (1); wherein diamond coating is provide by CVD in a reaction chamber and during CVD...

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Bibliographische Detailangaben
Hauptverfasser:	STEINMUELLER, DORIS, RICHARD, DAVID, CUSIN, PIERRE, STEINMUELLER, DETLEF, GHODBANE, SLIMANE, DREXEL, HERWIG
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	Method for coating micromechanical components of a micromechanical system, in particular a watch movement, comprising: providing a substrate (4) component to be coated; providing said component with a diamond coating (1); wherein diamond coating is provide by CVD in a reaction chamber and during CVD deposition, during the last portion of the growth process, a controlled change of the carbon content within the reaction chamber is provided, thereby providing a change of the sp2/sp3 carbon bonds (2) in the vicinity of the surface. Corresponding micromechanical components are also provided. L'invention concerne un procédé de revêtement de composants micromécaniques d'un système micromécanique, en particulier un mouvement de montre, le procédé comprenant les étapes qui consistent à prévoir un composant de substrat (4) à revêtir, à doter ledit composant d'un revêtement en diamant (1), le revêtement en diamant étant réalisé par CVD dans une chambre de réaction avec une modification contrôlée de la teneur en carbone dans la chambre de réaction au cours de la dernière partie du processus de croissance pendant le dépôt par CVD pour ainsi obtenir une modification des liaisons (2) sp2/sp3 du carbone au voisinage de la surface. L'invention propose également des composants micromécaniques correspondants.