ROLL-TO-ROLL DEPOSITION APPARATUS WITH IMPROVED WEB TRANSPORT SYSTEM
A system for the continuous deposition of a semiconductor material onto one or more webs of substrate material which are advanced therethrough includes a web transport system having a plurality of web support assemblies. Each web support assembly includes a base having a primary support arm pivotall...
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Format: | Patent |
Sprache: | eng ; fre |
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Zusammenfassung: | A system for the continuous deposition of a semiconductor material onto one or more webs of substrate material which are advanced therethrough includes a web transport system having a plurality of web support assemblies. Each web support assembly includes a base having a primary support arm pivotally mounted thereto so as to be displaceable from a first position to a second position. The support includes a first biasing member in mechanical communication with the primary support arm. The first biasing member operates to impart a first biasing force to the primary support arm so as to move it from its first position to its second position. The support includes a dancer arm which is pivotally mounted to the primary support arm so as to be displaceable from a first position to a second position relative to the primary support arm. The system further includes a second biasing member in mechanical communication with the dancer arm. The second biasing member operates to impart a second biasing force to the dancer arm so as to move it from its first position to its second position. A roller is rotatably supported on the dancer arm. The roller is configured to engage a portion of the web. The web support assembly operates to maintain continuous contact between the roller and the moving web of substrate material as it passes through the deposition system.
La présente invention a trait à un système permettant de déposer en continu une substance semi-conductrice sur une ou plusieurs bandes de matériau de substrat qui sont avancées au moyen dudit système. Ledit système inclut un système de transport de bandes doté d'une pluralité d'ensembles de support de bandes. Chaque ensemble de support de bandes inclut une base pourvue d'un bras support principal monté de façon pivotante sur ledit ensemble de manière à pouvoir être déplacé d'une première position à une seconde position. Le support inclut un premier élément de sollicitation en communication mécanique avec le bras support principal. Le premier élément de sollicitation fonctionne de manière à communiquer une première force de sollicitation au bras support principal de manière à le déplacer de se première position à sa seconde position. Le support inclut un bras à rouleau fou qui est monté de façon pivotante sur le bras support principal de manière à pouvoir être déplacé d'une première position à une seconde position par rapport au bras support principal. Le système inclut en outre un second élément de sollicitation e |
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