COMPOSITIONS AND METHODS FOR REMOVING ORGANIC SUBSTANCES

Compositions and methods useful for the removal of organic substances from substrates, for example, electronic device substrates such as microelectronic wafers or flat panel displays, are provided. A method is presented which applies a minimum volume of the composition as a coating to the inorganic...

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Bibliographische Detailangaben
Hauptverfasser: QUILLEN, MICHAEL, WAYNE, MOORE, JOHN, CLEAON, O'DELL, DALE, EDWARD, LEE, ZACHARY, PHILIP, MCENTIRE, EDWARD, ENNS
Format: Patent
Sprache:eng ; fre
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