MECHANICAL RESONATING STRUCTURES INCLUDING A TEMPERATURE COMPENSATION STRUCTURE

Mechanical resonating structures are described, as well as related devices and methods. The mechanical resonating structures may have a compensating structure for compensating temperature variations. L'invention concerne des structures résonantes mécaniques, ainsi que des dispositiFs et procédé...

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Bibliographische Detailangaben

Hauptverfasser:	KUYPERS, JAN, H, ZOLFAGHARKHANI, GUITI, GAIDARZHY, ALEXEI, CHEN, DAVID, M
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	ELECTRICITY
Online-Zugang:	Volltext bestellen
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