MECHANICAL RESONATING STRUCTURES INCLUDING A TEMPERATURE COMPENSATION STRUCTURE

MECHANICAL RESONATING STRUCTURES INCLUDING A TEMPERATURE COMPENSATION STRUCTURE

Mechanical resonating structures are described, as well as related devices and methods. The mechanical resonating structures may have a compensating structure for compensating temperature variations. L'invention concerne des structures résonantes mécaniques, ainsi que des dispositiFs et procédé...

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Bibliographische Detailangaben
Hauptverfasser: KUYPERS, JAN, H, ZOLFAGHARKHANI, GUITI, GAIDARZHY, ALEXEI, CHEN, DAVID, M
Format: Patent
Sprache:eng ; fre
Schlagworte:
ELECTRICITY
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Zusammenfassung:Mechanical resonating structures are described, as well as related devices and methods. The mechanical resonating structures may have a compensating structure for compensating temperature variations. L'invention concerne des structures résonantes mécaniques, ainsi que des dispositiFs et procédés associés. Lesdites structures résonantes mécaniques peuvent présenter une structure de compensation permettant de compenser des variations de température. Mechanical resonating structures are described, as well as related devices and methods. The mechanical resonating structures may have a compensating structure for compensating temperature variations.