PLATEN COOLING MECHANISM FOR CRYOGENIC ION IMPLANTING

A system and method for altering and maintaining the temperature of a workpiece, especially at cryogenic temperatures, is disclosed. The platen on which the workpiece is located contains at least one inner conduit through which fluid can flow. An apparatus, in communication with a fluid source, is b...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	FISH, ROGER, B, ANELLA, STEVEN, M, BARSKY, SAMUEL, M
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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