SOFTWARE APPLICATION TO ANALYZE EVENT LOG AND CHART TOOL FAIL RATE AS FUNCTION OF CHAMBER AND RECIPE

In one embodiment, a method for providing a user interface to graphically indicate a cause for fault-related events includes providing a user interface to illustrate a plurality of fault-related events for a plurality of recipes performed on a plurality of manufacturing process hardware tools, prese...

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Bibliographische Detailangaben

1. Verfasser:	SHIMSHI, RINAT
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING PHYSICS
Online-Zugang:	Volltext bestellen
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