COATING COMPOSITION FOR SEMICONDUCTOR DEVICE PROTECTION FILM

Disclosed is a resin solution composition which is used for forming an organic film that is used for device protection during water/chip conveyance in a processing step of a semiconductor substrate in production of semiconductor devices or production of MEMS. Specifically disclosed is a composition...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: AOBA, KAZUHIRO
Format: Patent
Sprache:eng ; fre ; jpn
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!