SYSTEM AND METHODS FOR CONSERVATION OF EXHAUST HEAT ENERGY

Methods, apparatus and systems are provided for conserving energy in an electronic device manufacturing facility. In one aspect an electronic device manufacturing system is provided including one or more process chambers; one or more abatement tools; two or more effluent conduits connecting the one...

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Bibliographische Detailangaben
1. Verfasser:	CHANDLER, PHIL
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS HEATING JOINTS OR FITTINGS FOR PIPES LIGHTING MEANS FOR THERMAL INSULATION IN GENERAL MECHANICAL ENGINEERING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PHYSICS PIPES REGULATING SEMICONDUCTOR DEVICES SEPARATION SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS THERMAL INSULATION IN GENERAL TRANSPORTING WEAPONS
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Beschreibung
Zusammenfassung:	Methods, apparatus and systems are provided for conserving energy in an electronic device manufacturing facility. In one aspect an electronic device manufacturing system is provided including one or more process chambers; one or more abatement tools; two or more effluent conduits connecting the one or more process chambers to the one or more abatement tools; a channel adapted to house a portion of at least two of the two or more effluent conduits; and one or more heating elements adapted to heat the two or more conduits within the channel. L'invention concerne des procédés, un appareil et un des systèmes de conservation de l'énergie au sein d'une unité de fabrication de dispositifs électroniques. Selon un aspect, un système de fabrication de dispositifs électroniques comprend une ou plusieurs chambres de traitement ; un ou plusieurs outils de réduction ; deux conduits d'effluents ou plus qui relient la ou les chambres de traitement aux outils de réduction ; un canal conçu pour contenir une partie d'au moins deux des deux conduits d'effluents ou plus ; et un ou plusieurs éléments chauffants conçus pour chauffer les deux conduits ou plus dans le canal.