TOOL FOR HANDLING A SUSCEPTOR, AND MACHINE FOR TREATING SUBSTRATES AND/OR WAFERS USING IT

The tool (1) according to the present invention is used for handling a susceptor (9) of a machine for treating substrates and/or wafers; the susceptor (9) has a disc-like shape and is adapted to support substrates and/or wafers; the tool (1 ) comprises a suction device (2) adapted to come in contact...

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Bibliographische Detailangaben
Hauptverfasser:	CRIPPA, DANILO, OGLIARI, VINCENZO, VALENTE, GIANLUCA, PRETI, FRANCO, KARLSSON, INGEMAR
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	The tool (1) according to the present invention is used for handling a susceptor (9) of a machine for treating substrates and/or wafers; the susceptor (9) has a disc-like shape and is adapted to support substrates and/or wafers; the tool (1 ) comprises a suction device (2) adapted to come in contact with the top face (91) of the susceptor (9) in order to grip and hold the latter by suction. La présente invention porte sur un outil (1) qui est utilisé pour manipuler un suscepteur (9) d'une machine pour traiter des substrats et/ou des tranches ; le suscepteur (9) a une forme de type disque et est apte à supporter des substrats et/ou des tranches ; l'outil (1) comprend un dispositif d'aspiration (2) conçu pour venir en contact avec la face supérieure (91) du suscepteur (9) afin de saisir et de tenir celui-ci par aspiration.