MULTI-AXIAL LINEAR AND ROTATIONAL DISPLACEMENT SENSOR

A MEMS multiaxial inertial sensor of angular and linear displacements has four comb drive capacitive sensing elements (18) integrated on a planar substrate (12), each having an output responsive to displacement along a Z axis, and responsive to a displacement along X or Y axes. The sensing elements...

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Bibliographische Detailangaben

Hauptverfasser:	VERJUS, FABRICE, GIRIDHAR, ARCHIT
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	GYROSCOPIC INSTRUMENTS INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK NAVIGATION PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SURVEYING TESTING
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