METHODS AND APPARATUS FOR EFFICIENT OPERATION OF AN ABATEMENT SYSTEM

A method of operating an electronic device manufacturing system is provided which includes the steps of receiving information with an interface, wherein the information relates to an abatement system, and shutting down a process tool and an abatement tool in response to the information. L'inven...

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Bibliographische Detailangaben
Hauptverfasser:	MOALEM, MEHRAN, CLARK, DANIEL, O, CRAWFORD, SHAUN, W, VERMEULEN, ROBBERT, M, FLIPPO, BELYNDA, LOLDJ, YOUSSEF, A
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CLEANING CLEANING IN GENERAL CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING FUNCTIONAL ELEMENTS OF SUCH SYSTEMS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PERFORMING OPERATIONS PHYSICS PREVENTION OF FOULING IN GENERAL REGULATING TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE TRANSPORTING
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Beschreibung
Zusammenfassung:	A method of operating an electronic device manufacturing system is provided which includes the steps of receiving information with an interface, wherein the information relates to an abatement system, and shutting down a process tool and an abatement tool in response to the information. L'invention concerne un procédé d'exploitation d'un système de fabrication de dispositifs électroniques, qui consiste à recevoir par une interface des informations se rapportant à un système d'assainissement; et à arrêter un outil de traitement et un outil d'assainissement consécutivement à ces informations.