SYSTEMS AND METHODS FOR A THIN FILM CAPACITOR HAVING A COMPOSITE HIGH-K THIN FILM STACK

Systems and methods are provided for fabricating a thin film capacitor involving depositing an electrode layer of conductive material on top of a substrate material, depositing a first layer of ferroelectric material on top of the substrate material using a metal organic deposition or chemical solut...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NAGY, SUSAN C, CAPANU, MIRCEA, ZELNER, MARINA
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS CAPACITORS CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES ORLIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE ELECTRICITY
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