MICRO ELECTRICAL MECHANICAL SYSTEMS PRESSURE SENSOR

A micro electrical mechanical system (MEMS) pressure sensor (100, 400, 700) includes a base structure (10) defining an opening (14), a plurality of support members (13, 15, 28) coupled to the base structure (10), a thin-film diaphragm (12) supported by the support members (13, 15, 28), and at least...

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Bibliographische Detailangaben
Hauptverfasser:	DONALDSON, JEREMY, H, NIKKEL, ERIC, L
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
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Beschreibung
Zusammenfassung:	A micro electrical mechanical system (MEMS) pressure sensor (100, 400, 700) includes a base structure (10) defining an opening (14), a plurality of support members (13, 15, 28) coupled to the base structure (10), a thin-film diaphragm (12) supported by the support members (13, 15, 28), and at least one strain-sensitive member (18) associated with the at least one support member (13, 15, 28). L'invention concerne un capteur de pression (100, 400, 700) de microsystèmes électromécaniques (MEMS) qui comprend une structure de base (10) définissant une ouverture (14), une pluralité d'éléments de support (13, 15, 28) reliés à la structure de base (10), une membrane en film mince (12) soutenue par les éléments de support (13, 15, 28) et au moins un élément sensible à la contrainte (18) associé à au moins un élément de support (13, 15, 28).