ION IMPLANTATION WITH A COLLIMATOR MAGNET AND A NEUTRAL FILTER MAGNET

ION IMPLANTATION WITH A COLLIMATOR MAGNET AND A NEUTRAL FILTER MAGNET

This disclosure describes an ion implanter having a collimator magnet that is configured to shape an ion beam. A first deceleration stage is configured to manipulate energy of the ion beam shaped by the collimator magnet. A neutral filter magnet is configured to filter neutral atoms from the ion bea...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CAMPBELL, CHRISTOPHER, W, SINCLAIR, FRANK, BENVENISTE, VICTOR, M
Format: Patent
Sprache:eng ; fre
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:This disclosure describes an ion implanter having a collimator magnet that is configured to shape an ion beam. A first deceleration stage is configured to manipulate energy of the ion beam shaped by the collimator magnet. A neutral filter magnet is configured to filter neutral atoms from the ion beam passing through the first deceleration stage. L'invention concerne un implanteur d'ions doté d'un aimant collimateur conçu pour former un faisceau d'ions. Un premier niveau de décélération est conçu pour manipuler l'énergie du faisceau d'ions formé par l'aimant collimateur. Un aimant filtre neutre est conçu pour filtrer des atomes neutres du faisceau d'ions qui traverse le premier niveau de décélération.