HEATER APPARATUS AND ASSOCIATED METHOD

A wafer processing apparatus, including a heater apparatus, is provided. The heater apparatus includes a coating layer; and a seal structure in contact with the coating layer. The seal structure is formed from a seal formable material. The seal formable material includes at least one of a YASB glass...

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Bibliographische Detailangaben
Hauptverfasser:	NAGESH, MAMATHA, VAIDHYANATHAN, BALASUBRAMANIAM, LOU, VICTOR, LIENKONG, WITTBRODT, MICHAEL, JOHN, RAMASESHA, SHEELA, KOLLALI, JOSHI, SALIL, MOHAN, DALAKOS, GEORGE, THEODORE, ZHONG, DALONG
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS CHEMISTRY ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY GLASS JOINING GLASS TO GLASS OR OTHER MATERIALS METALLURGY MINERAL OR SLAG WOOL SEMICONDUCTOR DEVICES SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS SURFACE TREATMENT OF GLASS
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Beschreibung
Zusammenfassung:	A wafer processing apparatus, including a heater apparatus, is provided. The heater apparatus includes a coating layer; and a seal structure in contact with the coating layer. The seal structure is formed from a seal formable material. The seal formable material includes at least one of a YASB glassy composition, a CGYP glassy composition, or a combination of the YASB glassy composition and the CGYP glassy composition. A method and device are also included. La présente invention concerne un appareil de traitement de tranche qui inclut un appareil d'élément chauffant. L'appareil d'élément chauffant inclut une couche de revêtement ; et une structure d'étanchéité en contact avec la couche de revêtement. La structure d'étanchéité est formée à partir d'une matière pouvant former un joint d'étanchéité. La matière pouvant former un joint d'étanchéité inclut au moins une composition parmi une composition vitreuse YASB, une composition vitreuse CGYP ou une combinaison de la composition vitreuse YASB et de la composition vitreuse CGYP. La présente invention fournit également un procédé et un dispositif.