IN-LINE FURNACE CONVEYORS WITH INTEGRATED WAFER RETAINERS

In one embodiment, an in-line furnace includes a continuous conveyor (152) configured to hold wafers (101) at an angle relative to ground. The conveyor may have fixedly integrated wafer retainers (231) configured to hold the wafers (101) in slots. The conveyor (152) may be formed by several segments...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MULLIGAN, WILLIAM P, PASS, THOMAS
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CONVEYING HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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