GAS CONVEYING PUMP, METHOD OF FORMING HEATER, AND SENSOR

A technique capable of highly accurately conveying even a slight amount of gas and highly reliable. A gas conveying pump (10) has a flow channel and a heater (20). The flow channel is composed of a chamber (12), an entrance side channel (13), an exit side channel (14), and a tapered inlet side diffu...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	IKEHARA, TSUYOSHI, MIHARA, TAKASHI, HEISIG, SVEN
Format:	Patent
Sprache:	eng ; fre ; jpn
Schlagworte:	BLASTING HEATING INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES LIGHTING MEASURING MECHANICAL ENGINEERING PHYSICS POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS TESTING WEAPONS
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