NANO ELECTROMECHANICAL INTEGRATED-CIRCUIT BANK AND SWITCH

A bank of nano electromechanical integrated circuit filters. The bank of integrated circuit filters comprising a silicon substrate; a sacrificial layer; a device layer including at least two resonators, wherein the at least two resonators include sub-micron excitable elements and wherein the at leas...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BADZEY, ROBERT L, MOHANTY, PRITIRAJ
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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