SUBSTRATE CARRIER ENCLOSURE

There is provided a portable substrate carrier enclosure. The carrier enclosure has a carrier support; a displaceable cover; spacers between the support and cover; a gas inlet; and a removable lid. There is also provided an assembly and a process for depositing an air-sensitive material onto a subst...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LANG, CHARLES, D, PERROTTO, JOSEPH, A, TILTON, JAMES, N, DALY, THOMAS, P
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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