SUBSTRATE CARRIER ENCLOSURE

There is provided a portable substrate carrier enclosure. The carrier enclosure has a carrier support; a displaceable cover; spacers between the support and cover; a gas inlet; and a removable lid. There is also provided an assembly and a process for depositing an air-sensitive material onto a subst...

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Bibliographische Detailangaben
Hauptverfasser:	LANG, CHARLES, D, PERROTTO, JOSEPH, A, TILTON, JAMES, N, DALY, THOMAS, P
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	There is provided a portable substrate carrier enclosure. The carrier enclosure has a carrier support; a displaceable cover; spacers between the support and cover; a gas inlet; and a removable lid. There is also provided an assembly and a process for depositing an air-sensitive material onto a substrate using the portable substrate carrier enclosure. L'invention concerne une enceinte de support de substrat portable. L'enceinte de support a un porte-support ; un capot déplaçable ; des cales d'espacement entre le porte-support et le capot ; une admission de gaz ; et un couvercle amovible. L'invention concerne également un ensemble et un processus permettant de déposer un matériau sensible à l'air sur un substrat en utilisant l'enceinte de support de substrat portable.