MODULAR CHEMICAL VAPOR DEPOSITION (CVD) REACTOR

The present invention provides an apparatus for processing semiconductor substrates. Particularly, the present invention provides a modular processing cell. The modular semiconductor processing cell of the present invention comprises a chamber (201) having an inject cap (213) and a gas panel module...

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Bibliographische Detailangaben
Hauptverfasser:	CARLSON, DAVID K, BURROWS, BRIAN H, METZNER, CRAIG R, AFZAL, IMRAN, ANDERSON, ROGER N, ISHIKAWA, DAVID MASAYUKI, COLLINS, RICHARD O, DEMARS, DENNIS L, CHACIN, JUAN M, MAGILL, KEITH M, CAMPBELL, JEFFREY
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The present invention provides an apparatus for processing semiconductor substrates. Particularly, the present invention provides a modular processing cell. The modular semiconductor processing cell of the present invention comprises a chamber (201) having an inject cap (213) and a gas panel module (207) configured to supply one or more processing gases to the chamber through the inject cap, wherein the gas panel module is positioned adjacent the inject cap. The processing module further comprises a lamp module (203) positioned below the chamber. The lamp module comprises a plurality of vertically oriented lamps. Procédés et dispositifs de traitement de substrats à semi-conducteur. En particulier, cellule de traitement modulaire destinée à être utilisée dans un outil multifonction. Ladite cellule comprend une chambre à capsule d'injection, un module de panneau de gaz conçu pour fournir un ou plusieurs gaz de traitement à la chambre, à travers la capsule, et le module considéré est adjacent à la capsule. La cellule comprend aussi un module lampe placé sous la chambre. Le module lampe comprend plusieurs lampes orientées verticalement.