FLEXIBLE MICRO/NANOFLUIDIC DEVICES

The present invention relates to a method for producing micro/nanofluidic devices that incorporate overhanging micromechanical and metallic components monolithically integrated with the fluidic circuitry. La presente invención se refiere a un procedimiento de fabricación de dispositivos micro-nanofl...

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Bibliographische Detailangaben
Hauptverfasser:	EZKERRA FERNANDEZ, AITOR, RUANO LOPEZ, JESUS MIGUEL, BLANCO BARRO, FCO. JAVIER, MAYORA ORIA, KEPA, SCHULZE, JANETTE LILIAN MARIA, AGUIRREGABIRIA IZAGUIRRE, MARIA
Format:	Patent
Sprache:	eng ; fre ; spa
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROMTHE BODY DIAGNOSIS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HUMAN NECESSITIES HYGIENE IDENTIFICATION MEDICAL OR VETERINARY SCIENCE MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS SEMICONDUCTOR DEVICES SURGERY TRANSPORTING
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Beschreibung
Zusammenfassung:	The present invention relates to a method for producing micro/nanofluidic devices that incorporate overhanging micromechanical and metallic components monolithically integrated with the fluidic circuitry. La presente invención se refiere a un procedimiento de fabricación de dispositivos micro-nanofluídicos que incorporan componentes metálicos y micro-mecánicos en voladizo integrados monolíticamente con la circuitería fluídica. La présente invention concerne un procédé de fabrication de dispositifs micro-nanofluidiques contenant des composants métalliques et micro-mécaniques en porte-à-faux intégrés de façon monolithique avec les circuits fluidiques.