SEMICONDUCTOR SUBSTRATE TEMPERATURE DETERMINATION

The invention provides a method and a device for determining the temperature of a semiconductor substrate. A resonance circuit (110) is provided on the semiconductor substrate and is formed by a junction capacitor (11) and an inductor (12). The substrate is placed on a holder and the resonance circu...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JACQUEMIN, JEAN-PHILIPPE, LUNENBORG, MEINDERT, M, KORDIC, SRDJAN
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	MEASURING MEASURING QUANTITY OF HEAT MEASURING TEMPERATURE PHYSICS TESTING THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
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