ANALOG MEMS WITH NON-LINEAR SUPPORT

The disclosed embodiments reveal an analog MEMS device with a pivotal micromirror (102) that is supported by one or more beams that provide non-linear resistance. An electrode (105) can electrostatically attract the micromirror, while the beam(s) (120) provide resistance to deflection. When the forc...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	MALONE, JOSHUA, J
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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