SUBSTRATE CASSETTE
The present invention relates to a substrate cassette (12) that houses a plurality of horizontally oriented substrates (14) in multiple levels in the vertical direction and in which support bars (20) are arranged that support the substrates so as to inhibit bending of the central portion of each sub...
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Format: | Patent |
Sprache: | eng ; fre |
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Zusammenfassung: | The present invention relates to a substrate cassette (12) that houses a plurality of horizontally oriented substrates (14) in multiple levels in the vertical direction and in which support bars (20) are arranged that support the substrates so as to inhibit bending of the central portion of each substrate, wherein a vertical direction adjustment mechanism (110) that adjusts distortion of the support bars in the vertical direction is provided between the support bars and a frame (18) formed on the back of the opposite side from the substrate insertion side.
L'invention concerne une cassette de substrat logeant plusieurs substrats orientés horizontalement dans plusieurs niveaux dans le sens vertical et dans laquelle des barres support sont disposées, lesquelles supportent les substrats de manière à inhiber le pliage de la partie centrale de chaque substrat, un mécanisme de réglage du sens vertical réglant la distorsion des barres support dans le sens vertical étant placé entre les barres support et un cadre formé sur le dos du côté opposé au côté d'insertion du substrat. |
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