METHOD AND APPARATUS FOR IMPROVED OPERATION OF AN ABATEMENT SYSTEM

In one aspect, an apparatus is provided that includes (1) an interface adapted to analyze information about an electronic device manufacturing system that produces an effluent having an undesirable material, and provide information about the effluent, and (2) an abatement system adapted to receive i...

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Hauptverfasser: RAOUX, SEBASTIEN, PORSHNEV, PETER, CURRY, MARK, W
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Sprache:eng ; fre
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creator RAOUX, SEBASTIEN
PORSHNEV, PETER
CURRY, MARK, W
description In one aspect, an apparatus is provided that includes (1) an interface adapted to analyze information about an electronic device manufacturing system that produces an effluent having an undesirable material, and provide information about the effluent, and (2) an abatement system adapted to receive information about the effluent, receive the effluent, and attenuate the undesirable material. Numerous other aspects are provided. Dans un aspect, l'invention concerne un appareil qui comprend (1) une interface conçue pour analyser des informations relatives à un système de fabrication de dispositif électronique produisant un effluent possédant un matériau indésirable et, qui fournit des informations relatives à cet effluent, et (2) un système de réduction de pollution conçu pour recevoir des informations relatives à l'effluent, pour recevoir cet effluent et atténuer la teneur en matériau indésirable. Cette invention comprend aussi d'autres nombreux aspects.
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fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_WO2007109081A3</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>WO2007109081A3</sourcerecordid><originalsourceid>FETCH-epo_espacenet_WO2007109081A33</originalsourceid><addsrcrecordid>eNrjZHDydQ3x8HdRcPQD4oAAxyDHkNBgBTf_IAVP34Ag_zBXFwX_AFegqKe_n4K_G1CdgqOTY4irr6tfiEJwZDCQxcPAmpaYU5zKC6W5GZTdXEOcPXRTC_LjU4sLEpNT81JL4sP9jQwMzA0NLA0sDB2NjYlTBQCk1ywS</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>METHOD AND APPARATUS FOR IMPROVED OPERATION OF AN ABATEMENT SYSTEM</title><source>esp@cenet</source><creator>RAOUX, SEBASTIEN ; PORSHNEV, PETER ; CURRY, MARK, W</creator><creatorcontrib>RAOUX, SEBASTIEN ; PORSHNEV, PETER ; CURRY, MARK, W</creatorcontrib><description>In one aspect, an apparatus is provided that includes (1) an interface adapted to analyze information about an electronic device manufacturing system that produces an effluent having an undesirable material, and provide information about the effluent, and (2) an abatement system adapted to receive information about the effluent, receive the effluent, and attenuate the undesirable material. Numerous other aspects are provided. Dans un aspect, l'invention concerne un appareil qui comprend (1) une interface conçue pour analyser des informations relatives à un système de fabrication de dispositif électronique produisant un effluent possédant un matériau indésirable et, qui fournit des informations relatives à cet effluent, et (2) un système de réduction de pollution conçu pour recevoir des informations relatives à l'effluent, pour recevoir cet effluent et atténuer la teneur en matériau indésirable. Cette invention comprend aussi d'autres nombreux aspects.</description><language>eng ; fre</language><subject>BLASTING ; CLEANING ; CLEANING IN GENERAL ; ENGINE PLANTS IN GENERAL ; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNALCOMBUSTION ENGINES ; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES ORENGINES IN GENERAL ; HEATING ; LIGHTING ; MACHINES OR ENGINES IN GENERAL ; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLIDMATERIALS OR FLUIDS ; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROMSOLID MATERIALS OR FLUIDS ; MECHANICAL ENGINEERING ; PERFORMING OPERATIONS ; POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS ; PREVENTION OF FOULING IN GENERAL ; PUMPS ; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS ; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS ; SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATICTABLES OR JIGS ; STEAM ENGINES ; TRANSPORTING ; WEAPONS</subject><creationdate>2008</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20080807&amp;DB=EPODOC&amp;CC=WO&amp;NR=2007109081A3$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25563,76418</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20080807&amp;DB=EPODOC&amp;CC=WO&amp;NR=2007109081A3$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>RAOUX, SEBASTIEN</creatorcontrib><creatorcontrib>PORSHNEV, PETER</creatorcontrib><creatorcontrib>CURRY, MARK, W</creatorcontrib><title>METHOD AND APPARATUS FOR IMPROVED OPERATION OF AN ABATEMENT SYSTEM</title><description>In one aspect, an apparatus is provided that includes (1) an interface adapted to analyze information about an electronic device manufacturing system that produces an effluent having an undesirable material, and provide information about the effluent, and (2) an abatement system adapted to receive information about the effluent, receive the effluent, and attenuate the undesirable material. Numerous other aspects are provided. Dans un aspect, l'invention concerne un appareil qui comprend (1) une interface conçue pour analyser des informations relatives à un système de fabrication de dispositif électronique produisant un effluent possédant un matériau indésirable et, qui fournit des informations relatives à cet effluent, et (2) un système de réduction de pollution conçu pour recevoir des informations relatives à l'effluent, pour recevoir cet effluent et atténuer la teneur en matériau indésirable. Cette invention comprend aussi d'autres nombreux aspects.</description><subject>BLASTING</subject><subject>CLEANING</subject><subject>CLEANING IN GENERAL</subject><subject>ENGINE PLANTS IN GENERAL</subject><subject>GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNALCOMBUSTION ENGINES</subject><subject>GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES ORENGINES IN GENERAL</subject><subject>HEATING</subject><subject>LIGHTING</subject><subject>MACHINES OR ENGINES IN GENERAL</subject><subject>MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLIDMATERIALS OR FLUIDS</subject><subject>MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROMSOLID MATERIALS OR FLUIDS</subject><subject>MECHANICAL ENGINEERING</subject><subject>PERFORMING OPERATIONS</subject><subject>POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS</subject><subject>PREVENTION OF FOULING IN GENERAL</subject><subject>PUMPS</subject><subject>PUMPS FOR LIQUIDS OR ELASTIC FLUIDS</subject><subject>SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS</subject><subject>SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATICTABLES OR JIGS</subject><subject>STEAM ENGINES</subject><subject>TRANSPORTING</subject><subject>WEAPONS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2008</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZHDydQ3x8HdRcPQD4oAAxyDHkNBgBTf_IAVP34Ag_zBXFwX_AFegqKe_n4K_G1CdgqOTY4irr6tfiEJwZDCQxcPAmpaYU5zKC6W5GZTdXEOcPXRTC_LjU4sLEpNT81JL4sP9jQwMzA0NLA0sDB2NjYlTBQCk1ywS</recordid><startdate>20080807</startdate><enddate>20080807</enddate><creator>RAOUX, SEBASTIEN</creator><creator>PORSHNEV, PETER</creator><creator>CURRY, MARK, W</creator><scope>EVB</scope></search><sort><creationdate>20080807</creationdate><title>METHOD AND APPARATUS FOR IMPROVED OPERATION OF AN ABATEMENT SYSTEM</title><author>RAOUX, SEBASTIEN ; PORSHNEV, PETER ; CURRY, MARK, W</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_WO2007109081A33</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre</language><creationdate>2008</creationdate><topic>BLASTING</topic><topic>CLEANING</topic><topic>CLEANING IN GENERAL</topic><topic>ENGINE PLANTS IN GENERAL</topic><topic>GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNALCOMBUSTION ENGINES</topic><topic>GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES ORENGINES IN GENERAL</topic><topic>HEATING</topic><topic>LIGHTING</topic><topic>MACHINES OR ENGINES IN GENERAL</topic><topic>MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLIDMATERIALS OR FLUIDS</topic><topic>MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROMSOLID MATERIALS OR FLUIDS</topic><topic>MECHANICAL ENGINEERING</topic><topic>PERFORMING OPERATIONS</topic><topic>POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS</topic><topic>PREVENTION OF FOULING IN GENERAL</topic><topic>PUMPS</topic><topic>PUMPS FOR LIQUIDS OR ELASTIC FLUIDS</topic><topic>SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS</topic><topic>SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATICTABLES OR JIGS</topic><topic>STEAM ENGINES</topic><topic>TRANSPORTING</topic><topic>WEAPONS</topic><toplevel>online_resources</toplevel><creatorcontrib>RAOUX, SEBASTIEN</creatorcontrib><creatorcontrib>PORSHNEV, PETER</creatorcontrib><creatorcontrib>CURRY, MARK, W</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>RAOUX, SEBASTIEN</au><au>PORSHNEV, PETER</au><au>CURRY, MARK, W</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>METHOD AND APPARATUS FOR IMPROVED OPERATION OF AN ABATEMENT SYSTEM</title><date>2008-08-07</date><risdate>2008</risdate><abstract>In one aspect, an apparatus is provided that includes (1) an interface adapted to analyze information about an electronic device manufacturing system that produces an effluent having an undesirable material, and provide information about the effluent, and (2) an abatement system adapted to receive information about the effluent, receive the effluent, and attenuate the undesirable material. Numerous other aspects are provided. Dans un aspect, l'invention concerne un appareil qui comprend (1) une interface conçue pour analyser des informations relatives à un système de fabrication de dispositif électronique produisant un effluent possédant un matériau indésirable et, qui fournit des informations relatives à cet effluent, et (2) un système de réduction de pollution conçu pour recevoir des informations relatives à l'effluent, pour recevoir cet effluent et atténuer la teneur en matériau indésirable. Cette invention comprend aussi d'autres nombreux aspects.</abstract><oa>free_for_read</oa></addata></record>
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subjects BLASTING
CLEANING
CLEANING IN GENERAL
ENGINE PLANTS IN GENERAL
GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNALCOMBUSTION ENGINES
GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES ORENGINES IN GENERAL
HEATING
LIGHTING
MACHINES OR ENGINES IN GENERAL
MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLIDMATERIALS OR FLUIDS
MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROMSOLID MATERIALS OR FLUIDS
MECHANICAL ENGINEERING
PERFORMING OPERATIONS
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PREVENTION OF FOULING IN GENERAL
PUMPS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATICTABLES OR JIGS
STEAM ENGINES
TRANSPORTING
WEAPONS
title METHOD AND APPARATUS FOR IMPROVED OPERATION OF AN ABATEMENT SYSTEM
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