METHOD AND APPARATUS FOR IMPROVED OPERATION OF AN ABATEMENT SYSTEM

In one aspect, an apparatus is provided that includes (1) an interface adapted to analyze information about an electronic device manufacturing system that produces an effluent having an undesirable material, and provide information about the effluent, and (2) an abatement system adapted to receive i...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	RAOUX, SEBASTIEN, PORSHNEV, PETER, CURRY, MARK, W
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BLASTING CLEANING CLEANING IN GENERAL ENGINE PLANTS IN GENERAL GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNALCOMBUSTION ENGINES GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES ORENGINES IN GENERAL HEATING LIGHTING MACHINES OR ENGINES IN GENERAL MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLIDMATERIALS OR FLUIDS MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROMSOLID MATERIALS OR FLUIDS MECHANICAL ENGINEERING PERFORMING OPERATIONS POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PREVENTION OF FOULING IN GENERAL PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATICTABLES OR JIGS STEAM ENGINES TRANSPORTING WEAPONS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	In one aspect, an apparatus is provided that includes (1) an interface adapted to analyze information about an electronic device manufacturing system that produces an effluent having an undesirable material, and provide information about the effluent, and (2) an abatement system adapted to receive information about the effluent, receive the effluent, and attenuate the undesirable material. Numerous other aspects are provided. Dans un aspect, l'invention concerne un appareil qui comprend (1) une interface conçue pour analyser des informations relatives à un système de fabrication de dispositif électronique produisant un effluent possédant un matériau indésirable et, qui fournit des informations relatives à cet effluent, et (2) un système de réduction de pollution conçu pour recevoir des informations relatives à l'effluent, pour recevoir cet effluent et atténuer la teneur en matériau indésirable. Cette invention comprend aussi d'autres nombreux aspects.