THERMAL MASS GAS FLOW SENSOR AND METHOD OF FORMING SAME

A thermal gas flow sensor and method of forming such a sensor. The sensor has a substrate and a heater disposed on the substrate. At least one pair of thermal sensing elements is disposed on the substrate either side of the heater. A protective layer is disposed on at least the heater and/or the the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	DMYTRIW, ANTHONY M, GEHMAN, RICHARD W, BLUMHOFF, CHRISTOPHER M
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	MEASURING MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL METERING BY VOLUME PHYSICS TESTING
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