INTEGRATED MICRO FUEL CELL APPARATUS

A micro fuel cell and method of forming such includes depositing multiple layers (22) of alternating metals over a substrate (12); etching at least one metal from the multiple layers (22) creating a void between the remaining layers; forming a plurality of pedestals (28) in the multiple layers (22),...

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Bibliographische Detailangaben
Hauptverfasser: BAKER, JEFFREY H, D'URSO, JOHN J, KORIPELLA, CHOWDARY R
Format: Patent
Sprache:eng ; fre
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