A SYSTEM AND METHOD FOR REMOVING PARTICLES FROM A POLISHING PAD

A system for removing particles from a polishing pad to improve the efficiency of the removal of material by the polishing pad as part of a chemical-mechanical polishing process, the system comprising a polishing pad; a fluid dispenser arranged to dispense a fluid on the polishing pad; and removal m...

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Bibliographische Detailangaben
Hauptverfasser:	FARKAS, JANOS, PETITDIDIER, SEBASTIEN, KORDIC, SRDJAN, DEL MONACO, SILVIO
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPARATUS THEREFOR CHEMISTRY DRESSING OR CONDITIONING OF ABRADING SURFACES ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINE TOOLS MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING METAL-WORKING NOT OTHERWISE PROVIDED FOR METALLURGY PERFORMING OPERATIONS POLISHING PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROMOBJECTS SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL TRANSPORTING WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OFELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKESTHE PLACE OF A TOOL
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Beschreibung
Zusammenfassung:	A system for removing particles from a polishing pad to improve the efficiency of the removal of material by the polishing pad as part of a chemical-mechanical polishing process, the system comprising a polishing pad; a fluid dispenser arranged to dispense a fluid on the polishing pad; and removal means, wherein the removal means include a heater for increasing the temperature of the fluid dispensed on the polishing pad, and/or voltage means for coupling the polishing pad to a voltage source for repelling charged particles from the polishing pad surface while the fluid dispenser is dispensing the fluid on the polishing pad. L'invention concerne un système d'élimination des particules d'un tampon de polissage en vue d'améliorer l'efficacité de l'enlèvement de matière par le tampon de polissage dans une opération de polissage chimique-mécanique, le système comprenant un tampon de polissage, un distributeur de fluide agencé de manière à distribuer un fluide sur le tampon de polissage et des moyens d'enlèvement, les moyens d'enlèvement comprenant un dispositif de chauffage qui augmente la température du fluide distribué sur le tampon de polissage et/ou des moyens sous tension électrique qui couplent le tampon de polissage à une source de tension électrique pour repousser les particules chargées hors de la surface du tampon de polissage pendant que le distributeur de fluide délivre le fluide sur le tampon de polissage.