FLOW-FORMED CHAMBER COMPONENT HAVING A TEXTURED SURFACE

A method of fabricating a component for a substrate processing chamber involves providing a preform having internal and external surfaces, and providing a mandrel having a textured surface with a pattern of textured features comprising protrusions and depressions. The internal surface of the preform...

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Bibliographische Detailangaben
Hauptverfasser:	SOMMERS, JOSEPH, F, VESCI, ANTHONY, DICKERSON, SCOTT, ABNEY, STEPHEN, E, SCHWEITZER, MARC, O, TILLER, JENNIFER
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVINGMATERIAL METALLURGY PERFORMING OPERATIONS PUNCHING METAL SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING WORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS ORPROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL
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Beschreibung
Zusammenfassung:	A method of fabricating a component for a substrate processing chamber involves providing a preform having internal and external surfaces, and providing a mandrel having a textured surface with a pattern of textured features comprising protrusions and depressions. The internal surface of the preform component is contacted with the textured surface of mandrel, and a pressure is applied to the external surface of the preform. The pressure is sufficiently high to plastically deform the preform over the textured surface of the mandrel to form a component having a textured internal surface comprising the pattern of textured feature that are shaped and sized to adhere process residues generated in the processing of substrates. L'invention concerne un procédé de fabrication d'un composant pour une chambre de traitement de substrat qui consiste à utiliser une préforme présentant une surface intérieure et une surface extérieure, et un mandrin présentant une surface texturée qui comporte un motif d'éléments texturés constitués de parties saillantes et de parties creuses. La surface intérieure du composant de préforme est mise en contact avec la surface texturée du mandrin, et une pression est appliquée sur la surface extérieure de la préforme. La pression est suffisamment élevée pour déformer de manière plastique la préforme sur la surface texturée du mandrin afin que soit formé un composant présentant une surface intérieure texturée qui comporte le motif d'éléments texturés aux formes et aux dimensions conçues pour retenir les résidus de traitement générés lors du traitement de substrats.