SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME

A semiconductor device is provided with a groove section (11) formed on a semiconductor substrate (10); first ONO films (18) arranged on both side planes of the groove section (11); and first word lines (22) arranged on side planes of the first ONO films (18) and extend in the longitudinal direction...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HOSAKA, MASAYA, OKANISHI, MASATOMI, HEO, NAMJIN
Format: Patent
Sprache:eng ; fre ; jpn
Schlagworte:
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