SYSTEM TO TRANSFER A TEMPLATE TRANSFER BODY BETWEEN A MOTION STAGE AND A DOCKING PLATE

The present invention is directed towards an imprint lithography system including, inter alia, a docking plate; a motion stage having a range of motion associated therewith, the range of motion having a periphery spaced-apart 'from the docking plate a first distance; and a body, having first an...

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Bibliographische Detailangaben
Hauptverfasser:	SCHUMAKER, PHILIP, D, KIM, JAE, H, FANCELLO, ANGELO, BABBS, DANIEL, A, CHOI, BYUNG-JIN
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BLASTING BRAKES CINEMATOGRAPHY CLUTCHES COUPLINGS FOR TRANSMITTING ROTATION ELECTROGRAPHY ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING HOLOGRAPHY LIGHTING MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MATERIALS THEREFOR MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES MECHANICAL ENGINEERING NANOTECHNOLOGY ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES THERMAL INSULATION IN GENERAL TRANSPORTING WEAPONS
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Beschreibung
Zusammenfassung:	The present invention is directed towards an imprint lithography system including, inter alia, a docking plate; a motion stage having a range of motion associated therewith, the range of motion having a periphery spaced-apart 'from the docking plate a first distance; and a body, having first and second opposed sides spaced- apart a second distance, selectively coupled between the docking plate and the motion stage, the first distance being greater than the second distance to minimize a probability of a collision between the docking plate, the motion stage and the body while transferring the body between the docking plate and the motion stage. La présente invention concerne un système de lithographie par impression comportant, entre autres, une plaque d'assemblage, un étage mobile auquel une amplitude de mouvement est associée, cette amplitude de mouvement présentant une périphérie placée à une première distance de la plaque d'assemblage, ainsi qu'un corps présentant des premier et second côtés opposés placés à une seconde distance l'un de l'autre, couplé sélectivement entre la plaque d'assemblage et l'étage mobile, la première distance étant supérieure à la seconde distance afin de minimiser une probabilité de collision entre la plaque d'assemblage, l'étage mobile et le corps, lorsque ce corps est transféré entre la plaque d'assemblage et l'étage mobile.