SYSTEM AND METHOD FOR POSITIONING AN OBJECT

A motion system includes a first stage that is configured to rotate about a first axis and a second stage coupled to the first stage that includes an object carrier adapted to position an object in at least one other axis. The motion system has a novel arrangement of laser interferometer elements an...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LEWIS, GEORGE, C, KROKAR, ZELIMIR
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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