MICROFLUIDIC DEVICE WITH INTEGRATED MICROPUMP, IN PARTICULAR BIOCHEMICAL MICROREACTOR, AND MANUFACTURING METHOD THEREOF

A microfluidic device for nucleic acid analysis includes a monolithic semiconductor body (13), a microfluidic circuit (10), at least partially accommodated in the monolithic semiconductor body (13), and a micropump (11). The microfluidic circuit (10) includes a sample preparation channel (18) formed...

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Bibliographische Detailangaben
1. Verfasser:	SCURATI, MARIO GIOVANNI
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BLASTING CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS HEATING LIGHTING MECHANICAL ENGINEERING MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TRANSPORTING WEAPONS
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Zusammenfassung:	A microfluidic device for nucleic acid analysis includes a monolithic semiconductor body (13), a microfluidic circuit (10), at least partially accommodated in the monolithic semiconductor body (13), and a micropump (11). The microfluidic circuit (10) includes a sample preparation channel (18) formed on the monolithic semiconductor body (13) and at least one microfluidic channel (20, 22) buried in the monolithic semiconductor body (13). The micropump (11), includes a plurality of sealed chambers (40) provided with respective openable sealing elements (41) and having a first pressure therein that is different from a second pressure in the microfluidic circuit (10). In addition, the micropump (11) and the microfluidic circuit (10) are configured so that opening the openable sealing elements (41) provides fluidic coupling between the respective chambers (40) and the microfluidic circuit (10). The openable sealing elements (41) are integrated in the monolithic semiconductor body (13). L'invention concerne un dispositif microfluidique d'analyse d'acides nucléiques comprenant un corps semi-conducteur monolithique (13), un circuit microfluidique (10) logé au moins partiellement dans le corps semi-conducteur monolithique (13), ainsi qu'une micropompe (11). Le circuit microfluidique (10) comprend un canal de préparation d'échantillon (18) formé sur le corps semi-conducteur monolithique (13) et au moins un canal microfluidique (20, 22) enterré dans le corps semi-conducteur monolithique (13). La micropompe (11) comprend une pluralité de chambres étanches (40) possédant des éléments d'étanchéité ouvrants (41) respectifs et présentant une première pression intérieure différente d'une seconde pression dans le circuit microfluidique (10). En outre, la micropompe (11) et le circuit microfluidique (10) sont conçus de façon que l'ouverture des éléments d'étanchéité ouvrants (41) permette d'obtenir un couplage fluidique entre les chambres (40) respectives et le circuit microfluidique (10). Les éléments d'étanchéité ouvrants (41) sont intégrés dans le corps semi-conducteur monolithique (13).